Liquid metal MEMS switch
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United States of America Patent
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Jul 23, 2024
Grant Date -
Oct 19, 2023
app pub date -
Jun 23, 2023
filing date -
Dec 27, 2018
priority date (Note) -
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status (Latency Note)
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Abstract
A switch that includes a droplet capable of spreading between two conductors to allow them to be coupled when a voltage is applied. The droplet can be enclosed by a cap that is bonded to a wafer that the droplet is placed upon, and include metallic properties. The cap can create a cavity that may be filled by a fluid, gas, or vapor. The cavity can have multiple conductors that extend partially or fully through it. The droplet can couple the conductors when specific voltages, or frequencies are applied to them. At the specific voltage and frequency, the droplet can spread, allowing at least two conductors to be coupled.
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