Method of manufacturing devices

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United States of America

PATENT NO 12044980
SERIAL NO

17296316

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Abstract

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A method for analyzing a process, the method including obtaining a multi-dimensional probability density function representing an expected distribution of values for a plurality of process parameters; obtaining a performance function relating values of the process parameters to a performance metric of the process; and using the performance function to map the probability density function to a performance probability function having the process parameters as arguments.

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Patent Owner(s)

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ASML NETHERLANDS B VDE RUN 6501 VELDHOVEN NL-5504 DR

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cheng, Yana San Jose, US 16 69
Genin, Maxime Philippe Frederic San Mateo, US 6 20
Hastings, Simon Philip Spencer San Jose, US 12 40
Lin, Chenxi Newark, US 40 572
Menchtchikov, Boris Redwood City, US 36 521
Slachter, Abraham Waalre, NL 11 27
Slotboom, Daan Maurits Wolphaartsdijk, NL 19 104
Tabery, Cyrus Emil San Jose, US 13 22
Tel, Wim Tjibbo Helmond, NL 78 537
Timoshkov, Vadim Yourievich Veldhoven, NL 4 8
Van, Der Straten Koen Wilhelmus Cornelis Adrianus Oud Gastel, NL 2 8
Zhang, Youping Cupertino, US 67 2240
Zou, Yi Foster City, US 85 486

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