Forming apparatus, forming method, and article manufacturing method
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United States of America Patent
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Jul 23, 2024
Grant Date -
Oct 22, 2020
app pub date -
Apr 19, 2019
filing date -
Apr 19, 2019
priority date (Note) -
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Abstract
A forming apparatus forming a composition on a substrate by using a mold, includes a supplier configured to supply a composition on the substrate, a plurality of processors including a first processor and a second processor, each of the plurality of processors being configured to bring the mold into contact with the composition supplied onto the substrate by the supplier, and a substrate conveyer configured to convey the substrate onto which the composition is supplied by the supplier to the first processor and then convey other substrate onto which the composition is supplied following the substrate to the second processor.
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