Power optimized driving signal switching scheme for oscillating MEMS mirrors
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United States of America Patent
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Jul 23, 2024
Grant Date -
Oct 27, 2022
app pub date -
Apr 23, 2021
filing date -
Apr 23, 2021
priority date (Note) -
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Abstract
An oscillator driver system includes an oscillator structure and a driver circuit. The oscillator structure includes a rotor terminal configured to receive a rotor voltage and a stator terminal configured to receive a stator voltage, and is driven about a rotation axis according to a voltage difference between the rotor and stator voltages. The driver circuit is configured to generate a driving signal and output the driving signal as the rotor voltage, wherein the driving signal toggles between low and high voltage levels at an actuation frequency to drive the oscillator structure about the rotation axis, and wherein the stator voltage is a fixed voltage. The low and high voltage levels are greater than the stator voltage such that the voltage difference toggles between a low voltage difference and a high voltage difference as the driving signal toggles between the low voltage level and the high voltage level, respectively.
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