Dispersion plate and coating device including same
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United States of America Patent
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Jul 23, 2024
Grant Date -
Mar 4, 2021
app pub date -
Aug 22, 2019
filing date -
Aug 24, 2018
priority date (Note) -
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Abstract
The present invention relates to a dispersion plate and a coating device comprising the same, which provides a dispersion plate comprising a plurality of gas injection holes, wherein the dispersion plate includes a plurality of spout nozzles formed by a dense arrangement of the gas injection holes, wherein one spout nozzle is disposed at the center of the dispersion plate and the plurality of spout nozzles are arranged along a plurality of virtual concentric circles from the center of the dispersion plate to the edge of the dispersion plate, where with respect to two adjacent virtual concentric circles, the number of spout nozzles arranged along an outer concentric circle based on the center of the dispersion plate is twice the number of spout nozzles arranged along an inner concentric circle and the arrangement interval of the spout nozzles arranged along the outer concentric circle is half the arrangement interval of the spout nozzles arranged along the inner concentric circle.
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