Imaging optical arrangement to image an object illuminated by X-rays

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United States of America Patent

PATENT NO 12040103
APP PUB NO 20230050439A1
SERIAL NO

17402819

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An imaging optical arrangement serves to image an object illuminated by X-rays. An imaging optics serves to image a transfer field in a field plane into a detection field in a detection plane. A layer of scintillator material is arranged at the transfer field. A stop is arranged in a pupil plane of the imaging optics. The imaging optics has an optical axis. A center of a stop opening of the stop is arranged at a decentering distance with respect to the optical axis. Such imaging optical arrangement ensures a high quality imaging of the object irrespective of a tilt of X-rays entering the transfer field. The imaging optical arrangement is part of a detection assembly further comprising a detection array and an object mount. Such detection assembly is part of a detection system further comprising a X-ray source.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS SMT GMBHRUDOLF-EBER-STRASSE 2 OBERKOCHEN 73447

International Classification(s)

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  • 2021 Application Filing Year
  • G21K Class
  • 176 Applications Filed
  • 86 Patents Issued To-Date
  • 48.87 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances202120222023202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Feldmann, Heiko Aalen, DE 77 442
Ruoff, Johannes Aalen, DE 43 353

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges4303201 - 100255075100125150175200225250275300325350375400425450475

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