Reflective mask blank for EUV lithography

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United States of America Patent

PATENT NO 12038685
APP PUB NO 20230305383A1
SERIAL NO

18201705

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Abstract

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A reflective mask blank for EUV lithography includes a substrate, a reflective layer for reflecting EUV light, and an absorption layer for absorbing EUV light. The reflective layer and the absorption layer are formed on or above the substrate in this order. The absorption layer contains tantalum (Ta) and niobium (Nb), and the absorption layer has a composition ratio Ta:Nb of Ta (at %) to Nb (at %) of from 4:1 to 1:4. Among diffraction peaks derived from the absorption layer observed at 2θ: from 20° to 50° by out-of-plane XRD method, a peak having the highest intensity has a half width FWHM of 1.0° or more.

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Patent OwnerAddress
AGC INC5-1 MARUNOUCHI 1-CHOME CHIYODA-KU TOKYO 1008405 ?1008405

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Akagi, Daijiro Tokyo, JP 24 20
Hanekawa, Hiroshi Koriyama, JP 24 82
Kawahara, Hirotomo Tokyo, JP 23 78
Tanabe, Hiroyoshi Tokyo, JP 20 307
Uno, Toshiyuki Koriyama, JP 32 319

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