Rotational flow generator, piping system, semiconductor manufacturing apparatus, and heat exchanger
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United States of America
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Jul 16, 2024
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N/A
app pub date -
Nov 22, 2018
filing date -
Nov 22, 2018
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Abstract
Provided are a rotational flow generator, a piping system, a semiconductor manufacturing apparatus, and a heat exchanger that enable the clogging of a pipe member to be more effectively prevented. A rotational flow generator 1 comprises a spray port 14a that can be attached to/removed from a pipe member 103 through which a first fluid flows, and that sprays a second fluid in a direction inclined with respect to the center axis line of the pipe member 103. A rotational flow generated by the rotational flow generator 1 can reduce the amount of accretion on an inner wall of the pipe member 103.
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