Ingot puller apparatus having a flange that extends from the funnel or from the silicon feed tube

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United States of America Patent

PATENT NO 12037698
APP PUB NO 20230212779A1
SERIAL NO

17570146

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Abstract

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Methods for growing single crystal silicon ingots that involve silicon feed tube inert gas control are disclosed. Ingot puller apparatus that include a flange that extends radially from a silicon funnel or from a silicon feed tube to reduce backflow of gases from the silicon feed tube into the growth chamber are also disclosed.

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Patent Owner(s)

  • GLOBALWAFERS CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Pannocchia, Matteo Lana, IT 11 4
Porrini, Maria Merano, IT 13 5

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