Vibrator device, oscillator, gyro sensor, electronic apparatus, and vehicle
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United States of America Patent
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Jul 9, 2024
Grant Date -
Feb 9, 2023
app pub date -
Oct 18, 2022
filing date -
Oct 18, 2022
priority date (Note) -
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Abstract
A vibrator device includes a vibration element including a vibration portion and a fixed portion, a supporting member to which the fixed portion is attached to support the vibration element, and a first substrate to which the supporting member is attached, the supporting member includes a attaching portion attached to the first substrate, and A1≥A2 is satisfied in a case where an area of a rectangular region including the fixed portion is A1 and an area of a rectangular region including the attaching portion is A2 in a plan view seen from a thickness direction of the vibration element.
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