Transfer apparatus having link arms and stockers having the same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Jul 9, 2024
Grant Date -
Feb 9, 2023
app pub date -
Mar 1, 2022
filing date -
Mar 1, 2022
priority date (Note) -
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status (Latency Note)
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Abstract
A transfer apparatus includes a lower plate including a lower link arm and a lower support, the lower support being fixed to an upper surface of the lower plate, an upper plate on the lower plate and configured to support a wafer stacking box on an upper surface of the upper plate, the upper plate including an upper link arm, and an upper support that is fixed to the upper surface of the upper plate, and a fixing member that is connected to the upper link arm, the fixing member configured to selectively contact the wafer stacking box. The upper plate is aligned with the lower plate in a first horizontal direction, and is configured to perform linear movement on the lower plate in the first horizontal direction.
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