Cryogenic cooling system
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United States of America Patent
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Jul 9, 2024
Grant Date -
Nov 12, 2020
app pub date -
Jul 23, 2020
filing date -
Jan 23, 2018
priority date (Note) -
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Abstract
A cryogenic cooling system includes a gas circulation source; a cryocooler including a cryocooler stage that cools the cooling gas; an object-to-be-cooled gas flow path; a gas supply line that supplies a cooling gas from the gas circulation source via the cryocooler stage to the object-to-be-cooled gas flow path; a gas recovery line that recovers the cooling gas from the object-to-be-cooled gas flow path to the gas circulation source; at least one temperature sensor installed at a measurement location away from the object-to-be-cooled gas flow path along the gas supply line and/or a measurement location installed away from the object-to-be-cooled gas flow path along the gas recovery line; and a gas flow rate control unit that controls the gas circulation source to adjust a flow rate of the cooling gas flowing through the object-to-be-cooled gas flow path in accordance with a measured temperature at at least one measurement location.
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