Pillar-shaped semiconductor device and method for producing the same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 12029022
APP PUB NO 20220254790A1
SERIAL NO

17730561

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Abstract

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A bottom portion of a Ta pillar serving as a contact portion is connected to an N+ layer and a P+ layer, and a gate HfO2 layer is connected to side surfaces of Si pillars and a Ta pillar serving as a contact portion and an upper surface of a SiO2 layer between the Si pillars and the Ta pillar serving as the contact portion. Gate TiN layers are provided on a side surface of the gate HfO2 layer surrounding the Si pillars. Midpoints of the Si pillars and the Ta pillar serving as the contact portion are on one first line in plan view.

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Patent Owner(s)

  • UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Harada, Nozomu Tokyo, JP 261 1653
Masuoka, Fujio Tokyo, JP 412 6771

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