Semiconductor on insulator wafer with cavity structures

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United States of America

PATENT NO 12027580
SERIAL NO

17028178

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Abstract

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The present disclosure relates to semiconductor structures and, more particularly, to a semiconductor on insulator substrate with cavity structures and methods of manufacture. The structure includes: a bulk substrate with at least one rectilinear cavity structure; an insulator material sealing the at least one rectilinear cavity structure; and a buried insulator layer on the bulk substrate and over the at least one rectilinear cavity structure.

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GLOBALFOUNDRIES U S INC2600 GREAT AMERICA WAY SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Adusumilli, Siva P South Burlington, US 121 269
Ellis-Monaghan, John J Grand Isle, US 258 2660
Porth, Bruce W Jericho, US 30 62
Stamper, Anthony K Burlington, US 615 6820

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