Semiconductor wafer evaluation method and manufacturing method and semiconductor wafer manufacturing process management method
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United States of America
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Jul 2, 2024
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Nov 11, 2019
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Nov 11, 2019
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Abstract
Provided is an evaluation method of a semiconductor wafer having a polished surface, the method including a cleaning process of cleaning the semiconductor wafer with one or more kinds of cleaning liquid, measuring an LPD of the polished surface both before and after the cleaning process with a laser surface inspection device, and distinguishing the type of defect or foreign substance measured as the LPD, based on measurement results obtained in the measuring, according to distinguishing standards shown in Table A.
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