Optical element having a coating for influencing heating radiation and optical arrangement

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United States of America Patent

PATENT NO 12025818
APP PUB NO 20210364677A1
SERIAL NO

17393551

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Abstract

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The disclosure relates to an optical element, including: a substrate, a first coating, which is disposed on a first side of the substrate and is configured for reflecting radiation having a used wavelength (λEUV) in the EUV wavelength range, and a second coating, which is disposed on a second side of the substrate, for influencing heating radiation that is incident on the second side of the substrate. The disclosure also relates to an optical arrangement having at least one such optical element.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS SMT GMBHOBERKOCHEN

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bittner, Boris Roth, DE 45 321
Schmidt, Holger Aalen, DE 158 1642
Schneider, Sonja Oberkochen, DE 26 89
Schoemer, Ricarda Zusmarshausen, DE 19 51
Wabra, Norbert Werneck, DE 58 344

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