Quality prediction method, preparation method and system of conductive gallium oxide based on deep learning and Czochralski method
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United States of America Patent
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Jul 2, 2024
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May 25, 2023
app pub date -
Feb 5, 2021
filing date -
Dec 31, 2020
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Abstract
A quality prediction method, a preparation method and a system of conductive gallium oxide based on deep learning and Czochralski method. The quality prediction method includes the steps of obtaining preparation data of conductive gallium oxide single crystal prepared by Czochralski method. The preparation data includes a seed crystal data, an environmental data, and a control data. The environmental data includes doping element concentration and doping element type; preprocessing the preparation data to obtain a preprocessed preparation data; preparing the preprocessed data is input to a trained neural network model, and a predicted quality data corresponding to the conductive gallium oxide single crystal is obtained through the trained neural network model, and the predicted quality data includes a predicted carrier concentration.
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