Method for manufacturing de-powder device for piping, and method for installing same

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United States of America Patent

PATENT NO 12024771
APP PUB NO 20240043995A1
SERIAL NO

18271858

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Abstract

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The present disclosure relates to a method for manufacturing a de-powder device for piping and a method for installing the same, and more particularly, to a method for manufacturing a de-powder device for piping, which is for suppressing attachment and deposition of exhaust matters to an inner circumferential surface of a pipe exposed to the flow of exhaust matters such as unreacted raw material gas, reaction products, and the like exhausted from substrate processing devices for semiconductors and displays, and a method for installing the same.

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Patent Owner(s)

Patent OwnerAddress
BARON CO LTD214-8 WOLSAN-RO EUMBONG-MYEON ASAN-SI 31416

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kim, Gi Nam Cheonan-si, KR 2 0

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