Liquid ejecting head, liquid ejecting apparatus, and actuator

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 12023929
APP PUB NO 20230339229A1
SERIAL NO

18342240

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Abstract

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A liquid ejecting head includes a piezoelectric element and a vibrating plate configured to vibrate in response to actuation of the piezoelectric element, the vibrating plate including a first layer that contains SiO2 and a second layer that contains ZrO2 and that is stacked on the first layer. The second layer contains a first impurity element different from Zr, and the concentration of the first impurity element at an interface in contact with the first layer in the second layer is higher than the concentration of the first impurity element in an internal region that is included in the second layer and that is contiguous from the interface to the surface of the second layer.

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Patent Owner(s)

Patent OwnerAddress
SEIKO EPSON CORPORATIONSHINJUKU-KU TOKYO 163-08

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Koike, Harunobu Matsumoto, JP 23 2
Nakayama, Masao Shiojiri, JP 119 881
Nishi, Chihiro Chino, JP 5 1
Sawasaki, Tatsuo Fujimi-machi, JP 21 513
Shimizu, Toshihiro Fujimi-machi, JP 171 1487
Yamazaki, Yasushi Azumino, JP 88 968

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