Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles
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United States of America Patent
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Jul 2, 2024
Grant Date -
Apr 2, 2020
app pub date -
Dec 2, 2019
filing date -
Oct 17, 2014
priority date (Note) -
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Abstract
A polishing article manufacturing system includes a feed section and a take-up section, the take-up section comprising a supply roll having a polishing article disposed thereon for a chemical mechanical polishing process, a print section comprising a plurality of printheads disposed between the feed section and the take-up section, and a curing section disposed between the feed section and the take-up section, the curing section comprising one or both of a thermal curing device and an electromagnetic curing device.
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