Detection and charge neutralization device and method thereof

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United States of America Patent

PATENT NO 12022598
APP PUB NO 20230007762A1
SERIAL NO

17855333

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Abstract

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A detection and charge neutralization device comprises a vacuum chamber, an electrical optical system, and a charge neutralization member. The electrical optical system and the charge neutralization member are disposed inside the vacuum chamber. The electrical optical system, outputs a charged particle beam to an observation position of the vacuum chamber. The charge neutralization member provides a focused vacuum ultraviolet light to the observation position to neutralize the accumulating charges.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN ELECTRON MICROSCOPE INSTRUMENT CORPORATION3F NO 22 ZHANYE 2ND RD EAST DIST HSINCHU CITY 300

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Hsu-Wei Hsinchu, TW 1 0
Cheng, Hsin-Chi Hsinchu, TW 27 137
Hsieh, Ting-Yu Hsinchu, TW 2 6
Huang, Tsu-Wei Hsinchu, TW 7 8

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