Method for joining quartz pieces and quartz electrodes and other devices of joined quartz
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United States of America Patent
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Jun 25, 2024
Grant Date -
May 12, 2022
app pub date -
Nov 22, 2021
filing date -
Nov 22, 2021
priority date (Note) -
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Abstract
A method for joining quartz pieces using metallic aluminum as the joining element. The aluminum may be placed between two quartz pieces and the assembly may be heated in the range of 500 C to 650 C. The joining atmosphere may be non-oxygenated. A method for the joining of quartz pieces which may include barrier layers on the quartz pieces. The barrier layers may be impervious to aluminum diffusion and may be of a metal oxide or metal nitride. The quartz pieces with the barrier layers may then be joined at temperatures higher than 650 C and less than 1200 C. A device such as an RF antenna or electrode in support of semiconductor processing using joined quartz pieces wherein the aluminum joining layer which has joined the pieces and also functions as antenna electrode.
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