Grounding cap module and gas injection device
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jun 25, 2024
Grant Date -
Apr 13, 2023
app pub date -
Dec 13, 2022
filing date -
Nov 12, 2017
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A grounding cap module includes a main body, a frame portion, and a cap portion. The main body includes a first opening penetrating the main body and a grounding portion disposed on a periphery of the main body and configured to be electrically grounded. The frame portion is disposed on the main body and includes a second opening aligned with the first opening. The cap portion is disposed on the frame portion and covers the second opening, wherein the first opening, the second opening and the cap portion define a receiving cavity. A gas injection device and an etching apparatus using the same are also provided.
First Claim
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- H01J Class
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Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Dec 25, 2027 |
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| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Dec 25, 2035 |
