Waveform shape factor for pulsed PVD power

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United States of America Patent

PATENT NO 12018361
APP PUB NO 20220356559A1
SERIAL NO

17858592

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Abstract

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Power supplies, waveform function generators and methods for controlling a plasma process are described. The power supplies or waveform function generators include a component for executing the method in which a waveform shape change index is determined during a plasma process and evaluated for compliance with a predetermined tolerance.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Miller, Keith A Mountain View, US 121 2346
Zhang, Shouyin Livermore, US 21 165

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