Piezoelectric device, liquid ejecting head, liquid ejecting apparatus, and method of manufacturing piezoelectric device

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United States of America Patent

PATENT NO 12017456
APP PUB NO 20220363057A1
SERIAL NO

17662798

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Abstract

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The diaphragm includes a first layer containing silicon as a constituent element, a third layer disposed between the first layer and the piezoelectric actuator and containing zirconium as a constituent element, and a second layer disposed between the first layer and the third layer and containing at least one selected from the group consisting of a metal other than iron, silicon, and zirconium, a metalloid, and a semiconductor, as a constituent element, in the second layer and the third layer, a position with a highest concentration of impurities other than the constituent elements of the second layer and the third layer is in the second layer, a position with a highest concentration of zirconium is in the third layer, and a position with a highest concentration of silicon is in the first layer.

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Patent Owner(s)

Patent OwnerAddress
SEIKO EPSON CORPORATIONSHINJUKU-KU TOKYO 163-08

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Koike, Harunobu Matsumoto, JP 23 2
Nakayama, Masao Shiojiri, JP 119 881
Nishi, Chihiro Chino, JP 5 1
Sawasaki, Tatsuo Fujimi-machi, JP 21 513
Shimizu, Toshihiro Fujimi-machi, JP 171 1487

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