Heater and method of production of same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 12016087
APP PUB NO 20210160968A1
SERIAL NO

17048706

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Importance

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Abstract

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A heater includes a base body and a resistance heating element. The base body is configured by an insulating material and includes a top surface on which a wafer is placed. The resistance heating element extends in the base body along the top surface. A top surface of the resistance heating element and the base body are in contact with each other. A vacuum or gas-filled gap is interposed between a side surface of the resistance heating element and the base body.

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Patent Owner(s)

Patent OwnerAddress
KYOCERA CORPORATION6 TAKEDA TOBADONO-CHO FUSHIMI-KU KYOTO-SHI KYOTO 612-8501

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ishimine, Yuusaku Aira, JP 20 17
Kawanabe, Yasunori Kirishima, JP 17 252
Okawa, Yoshihiro Kirishima, JP 44 105
Terao, Shinya Kirishima, JP 4 18

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