Surface acoustic wave devices using piezoelectric film on silicon carbide

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 12015392
APP PUB NO 20210305965A1
SERIAL NO

17211094

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Abstract

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An acoustic resonator includes a piezoelectric thin film (PTF) disposed on a carrier substrate. The PTF confines a fundamental shear-horizontal (SH0) surface-acoustic wave (SAW) within the PTF. The acoustic resonator includes an input bus line coupled to an input source and a ground bus line coupled to a ground potential. The acoustic resonator includes a first grating reflector disposed at a first end of the PTF and coupled between the input bus line and the ground bus line. The acoustic resonator includes a second grating reflector disposed at a second end of the PTF and coupled between the input bus line and the ground bus line. The acoustic resonator includes interdigital transducers (IDTs) disposed between the first grating reflector and the second grating reflector. Each IDT includes an input electrode coupled to the input bus line, and a ground electrode coupled to the ground bus line.

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Patent Owner(s)

Patent OwnerAddress
THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS506 SOUTH WRIGHT STREET 352 HENRY ADMINISTRATION BLDG URBANA IL 61801

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gong, Songbin Champaign, US 30 456
Link, Steffen Urbana, US 3 3
Lu, Ruochen Chanpaign, US 15 227
Yang, Yansong Urbana, US 12 13
Zhang, Shibin Shanghai, CN 6 5

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