Electrostatic chuck, vacuum processing apparatus, and substrate processing method

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United States of America

PATENT NO 12014946
SERIAL NO

17270742

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Abstract

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[Object] To provide an electrostatic chuck that stably supports a substrate while suppressing a rapid increase in the volume of a gas, a vacuum processing apparatus, and a substrate processing method.

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Patent Owner(s)

Patent OwnerAddress
ULVAC INC2500 HAGISONO CHIGASAKI-SHI KANAGAWA 2538543 ?2538543

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Sakata, Genji Chigasaki, JP 4 5
Yokoo, Hidekazu Chigasaki, JP 5 12

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