Clamping appliance of reticle inner pod
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United States of America
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Jun 18, 2024
Grant Date -
N/A
app pub date -
Dec 30, 2022
filing date -
Dec 30, 2022
priority date (Note) -
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status (Latency Note)
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Abstract
A clamping appliance of a reticle inner pod comprises: two clamping seats and a power member. The two clamping seats face each other in a width direction. The power member adjusts a distance of the two clamping seats in the width direction. The two clamping seats each include a bottom wall, two side walls, a first step and a second step. The two side walls are respectively disposed at two ends of the bottom wall. The first step and the second step are sequentially arranged above the bottom wall along the width direction. The two clamping seats each further include two eaves, the two eaves are respectively perpendicularly connected to the two side walls, so that the eave, the side wall and the bottom wall are clamped to form a cladding space with three-sided cladding.
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Family
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Cited Art Landscape
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