Pellicle for flat panel display photomask
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jun 18, 2024
Grant Date -
May 25, 2023
app pub date -
Nov 21, 2022
filing date -
Sep 12, 2018
priority date (Note) -
In Force
status (Latency Note)
Importance
Loading Importance Indicators... 
Abstract
A pellicle assembly for large-size photomasks including a frame member configured to be affixed to a large-size photomask substrate, a substantially rigid and transparent pellicle membrane affixed to the frame member so as to protect at least a portion of the large-size photomask substrate from contamination during usage, storage and/or transport, and a coating on at least one of top and bottom surfaces of the pellicle membrane that binds the pellicle membrane to prevent separation of pellicle membrane material in the event of breakage.
First Claim
Other Claims data not available
Family
Loading Family data...
International Classification(s)
- 2022 Application Filing Year
- G03F Class
- 1894 Applications Filed
- 526 Patents Issued To-Date
- 27.78 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- G03F Class
- 0 % this patent is cited more than
- 1 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Dec 18, 2027 |
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Dec 18, 2031 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Dec 18, 2035 |
