Heater substrate, probe card substrate, and probe card

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 12013433
APP PUB NO 20230084616A1
SERIAL NO

17799698

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A heater substrate has an insulating substrate having a first surface and a second surface on the opposite side relative to the first surface and at least one heating element of spiral shape including plural heater wire pieces and positioned in or on the insulating substrate. The heating element of spiral shape has at least one adjustment section including a turn of all or some of the plural heater wire pieces. The plural heater wire pieces include a first heater wire piece and a second heater wire piece adjacent to the inner side of the first heater wire piece. In the adjustment section, the length of the first heater wire piece is smaller than the length of the second heater wire piece.

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Patent Owner(s)

Patent OwnerAddress
KYOCERA CORPORATION6 TAKEDA TOBADONO-CHO FUSHIMI-KU KYOTO-SHI KYOTO 612-8501

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jingu, Daisuke Kyoto, JP 2 1
Tanaka, Hidenori Kyoto, JP 119 556

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