Combustible gas sensor

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United States of America Patent

PATENT NO 12013363
APP PUB NO 20210255131A1
SERIAL NO

17059087

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A combustible gas sensor that includes a reference sensor. The reference sensor includes a first substrate having a first substrate first surface, a first insulating layer disposed on the first substrate first surface, and a first heater at least one of embedded within the first insulating layer and disposed on the first insulating layer. The first substrate is a MEMS substrate.

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Patent Owner(s)

Patent OwnerAddress
CARRIER CORPORATION13995 PASTEUR BLVD PALM BEACH GARDENS FL 33418

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Backman, Roger Alan Minneapolis, US 6 6
Evju, Jon K Shakopee, US 7 3
Follett, Gary Saint Paul, US 4 7
Nguyen, Thi A Champlin, US 1 2
Potasek, David P Lakeville, US 33 139
Sankarraj, Anand Venkatesh Eden Prairie, US 4 3
Wei, Siqi Minneapolis, US 2 2

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