Carbyne-based sensing device for high spatial resolution in DNA sequencing and biomolecule characterization and method of fabricating the same

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United States of America Patent

PATENT NO 12012329
APP PUB NO 20210253420A1
SERIAL NO

17173839

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Abstract

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A method of fabricating a sensing device for DNA sequencing and biomolecule characterization including the steps of fabricating a microelectrode chip having a silicon substrate and a silicon nitride diaphragm, attaching a monolayer graphene sheet to the silicon nitride diaphragm, dicing a portion of the monolayer graphene sheet to form a graphene microribbon, converting the graphene microribbon to a graphene nanoribbon, and converting the graphene nanoribbon to a carbyne. A sensing device for DNA sequencing and biomolecule characterization is also disclosed. The sensing device includes a silicon substrate, a cavity in the silicon substrate covered by a silicon nitride layer, microelectrodes attached to the silicon nitride layer, graphene covering the microelectrodes, and carbyne attached to a portion of the silicon nitride layer covering said cavity.

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Patent Owner(s)

Patent OwnerAddress
BOARD OF TRUSTEES OF THE UNIVERSITY OF ARKANSAS2404 NORTH UNIVERSITY AVE LITTLE ROCK AZ 72207

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ma, Bo Fayetteville, US 59 74
Seiwert, Ty Fayetteville, US 1 0
Tung, Steve Fayetteville, US 3 21

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