Multi-dielectric gate stack for crystalline thin film transistors

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12009433
SERIAL NO

16001837

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Embodiments disclosed herein include thin film transistors and methods of forming such thin film transistors. In an embodiment, the thin film transistor may comprise a substrate, a gate electrode over the substrate, and a gate dielectric stack over the gate electrode. In an embodiment, the gate dielectric stack may comprise a plurality of layers. In an embodiment, the plurality of layers may comprise an amorphous layer. In an embodiment, the thin film transistor may also comprise a semiconductor layer over the gate dielectric. In an embodiment, the semiconductor layer is a crystalline semiconductor layer. In an embodiment, the thin film transistor may also comprise a source electrode and a drain electrode.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
INTEL CORPORATION2200 MISSION COLLEGE BOULEVARD SANTA CLARA CA 95054

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chu-Kung, Benjamin Portland, US 218 2483
Dewey, Gilbert Beaverton, US 450 4629
Kavalieros, Jack Portland, US 275 9524
Le, Van H Portland, US 275 3341
Ma, Sean Portland, US 24 98
Melitz, Wilhelm Portland, US 1 1
Meric, Inanc Portland, US 10 69
Metz, Matthew V Portland, US 342 6181
Millard, Kent Hillsboro, US 4 11
Reshotko, Miriam Portland, US 22 85
Sharma, Abhishek A Hillsboro, US 257 560
Shivaraman, Shriram Hillsboro, US 84 526

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Dec 11, 2027
7.5 Year Payment $3600.00 $1800.00 $900.00 Dec 11, 2031
11.5 Year Payment $7400.00 $3700.00 $1850.00 Dec 11, 2035
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00