Heterogeneous integration of components onto compact devices using moiré based metrology and vacuum based pick-and-place

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United States of America Patent

PATENT NO 12009247
APP PUB NO 20230042873A1
SERIAL NO

17959932

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Abstract

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A method for assembling heterogeneous components. The assembly process includes using a vacuum based pickup mechanism in conjunction with sub-nm precise moiré alignment techniques resulting in highly accurate, parallel assembly of feedstocks.

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Patent Owner(s)

Patent OwnerAddress
BOARD OF REGENTS THE UNIVERSITY OF TEXAS SYSTEM210 WEST 7TH ST AUSTIN TX 78701 UNITED STATES OF AMERICA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Abed, Ovadia Austin, US 19 163
Ajay, Paras Austin, US 27 36
Cullinan, Michael Austin, US 8 12
Dunn, Lawrence Austin, US 9 55
Goyal, Vipul Austin, US 5 80
McDermott, Mark Austin, US 12 13
Sayal, Aseem Austin, US 12 10
Singhal, Shrawan Austin, US 26 264
Sreenivasan, Sidlgata V Austin, US 214 5594

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