Prober controlling device, prober controlling method, and prober

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United States of America Patent

PATENT NO 12007413
APP PUB NO 20240094254A1
SERIAL NO

18527013

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A prober controlling device for bringing probe needles into contact with semiconductor chips, includes an input data acquiring unit configured to acquire input data including temperature data of at least one of a probe card and a card holder, a predicting unit configured to predict a position of a tip end of a probe needle based on the input data acquired by the input data acquiring unit, using a prediction model that receives input of the input data and outputs the position of the tip end of the probe needle, and a determining unit configured to determine whether or not to execute prediction by the predicting unit, based on input data used as teacher data for machine learning of the prediction model and the input data acquired by the input data acquiring unit, before the prediction by the predicting unit.

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Patent Owner(s)

Patent OwnerAddress
TOKYO SEIMITSU CO LTDJAPAN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Matsuoka, Tatsuya Tokyo, JP 10 0
Otake, Shunsuke Tokyo, JP 13 31
Yoshida, Tetsuo Tokyo, JP 134 1467

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