Microscopic object collection system and microscopic object collection method

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United States of America

PATENT NO 12007317
SERIAL NO

17606183

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Abstract

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A laser module includes a plurality of light emission regions and the plurality of light emission regions emit a plurality of laser beams. An optical waveguide and a lens condense the plurality of laser beams to an identical focal point. An adjustment mechanism is configured to adjust relative positional relation between the sample stage and a condenser lens (the optical waveguide and the lens). A controller is configured to switch between a single-point irradiation mode and a multi-point irradiation mode. The single-point irradiation mode refers to a mode in which the adjustment mechanism is controlled such that the focal point of the plurality of laser beams falls on the thin film. The multi-point irradiation mode refers to a mode in which the adjustment mechanism is controlled such that the focal point does not fall on the thin film.

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Patent Owner(s)

Patent OwnerAddress
MURATA MANUFACTURING CO LTD10-1 HIGASHIKOTARI 1-CHOME NAGAOKAKYO-SHI KYOTO-FU 617-8555
UNIVERSITY PUBLIC CORPORATION OSAKA2-7-601 ASAHIMACHI 1-CHOME ABENO-KU OSAKA-SHI OSAKA 545-0051

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Iida, Takuya Sakai, JP 19 109
Ishikawa, Hiroki Nagaokakyo, JP 157 2738
Tokonami, Shiho Sakai, JP 18 52
Yamasaki, Tsutomu Nagaokakyo, JP 25 157

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