Purification apparatus and method of purifying hot zone parts

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 12006589
APP PUB NO 20220267923A1
SERIAL NO

17679576

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A purification apparatus and a method of purifying hot zone parts are provided. The purification apparatus is configured to remove impurities attached on at least one hot zone part. The purification apparatus includes a crystal high temperature furnace, an enclosed box disposed in the crystal high temperature furnace, an outer tube connected to the crystal high temperature furnace and the enclosed box, an inner tube disposed in the outer tube, and a gas inlet cover connected to the outer tube. The crystal high temperature furnace includes a furnace body, a furnace cover, and a thermal field module disposed in the furnace body. The gas inlet cover is configured to input a noble gas into the enclosed box through the inner tube, and the thermal field module is configured to heat the noble gas so that the impurities are heated and vaporized through the noble gas.

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Patent Owner(s)

Patent OwnerAddress
GLOBALWAFERS CO LTDHSINCHU TAIWAN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Chung-Sheng Hsinchu, TW 1 0
Chu, Yen-Hsun Hsinchu, TW 6 3
Fan, Yi-Hua Hsinchu, TW 12 56
Nakanishi, Masami Hsinchu, TW 9 19
Su, Yu-Sheng Hsinchu, TW 55 304
Wu, Yung-Chi Hsinchu, TW 5 9

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