Reactor system including a gas distribution assembly for use with activated species and method of using same

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12006572
SERIAL NO

17060507

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A reactor system including a gas distribution assembly and method of using the reactor system are disclosed. The gas distribution assembly includes a gas distribution device, a gas expansion area, and a showerhead plate downstream of the gas distribution device and the expansion area.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • ASM IP HOLDING B.V.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chao, Ion Hong Gilbert, US 4 259
Demos, Alexandros Scottsdale, US 37 2300
Gao, Peipei Tempe, US 18 1260
Lin, Xing Chandler, US 79 3508
M'Saad, Hichem Paradise Valley, US 125 14393
Ma, Mingyang Phoenix, US 7 1113
Ma, Paul Scottsdale, US 56 3689
Nagaraj, Prajwal Tempe, US 2 546
Wang, Wentao Phoenix, US 145 1713

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Dec 11, 2027
7.5 Year Payment $3600.00 $1800.00 $900.00 Dec 11, 2031
11.5 Year Payment $7400.00 $3700.00 $1850.00 Dec 11, 2035
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00