MEMS and NEMS structures

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United States of America Patent

PATENT NO 12006209
APP PUB NO 20200407219A1
SERIAL NO

16980792

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Abstract

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A method of manufacturing an electromechanical systems structure includes manufacturing sub-micron structural features. In some embodiments, the structural features are less than the lithographic limit of a lithography process.

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Patent Owner(s)

  • OBSIDIAN SENSORS, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Andrews, Sean San Diego, US 11 8
Chan, Edward La Jolla, US 45 753
Chang, Tallis La Jolla, US 19 34
Hong, John La Jolla, US 55 1227
Pan, Yaoling La Jolla, US 60 1366
Wen, Bing La Jolla, US 65 270

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