Marks for overlay measurement and overlay error correction
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jun 4, 2024
Grant Date -
Jul 6, 2023
app pub date -
Jan 4, 2022
filing date -
Jan 4, 2022
priority date (Note) -
In Force
status (Latency Note)
Importance
Calculated Rating
|
US Family Size
|
Non-US Coverage
|
Abstract
A mark for overlay error measurement and overlay error measurement is provided. The mark includes a first pattern and a second pattern. The first pattern is disposed on a first surface of a substrate. The second pattern is disposed on a second surface of the substrate. The second surface of the substrate is opposite to the first surface of the substrate. The first pattern overlaps at least a portion of the second pattern, and the first pattern and the second pattern collaboratively define a first overlay error.
First Claim
Other Claims data not available
Family
+
−
- No Family data available.
International Classification(s)
- 2022 Application Filing Year
- H01L Class
- 27731 Applications Filed
- 8200 Patents Issued To-Date
- 29.57 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H01L Class
- 0 % this patent is cited more than
- 1 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Dec 4, 2027 |
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Dec 4, 2031 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Dec 4, 2035 |
