Protection layer on low thermal expansion material (LTEM) substrate of extreme ultraviolet (EUV) mask

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12001132
SERIAL NO

16534968

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Abstract

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Fabricating a photomask includes forming a protection layer over a substrate. A plurality of multilayers of reflecting films are formed over the protection layer. A capping layer is formed over the plurality of multilayers. An absorption layer is formed over capping layer. A first photoresist layer is formed over portions of absorption layer. Portions of the first photoresist layer and absorption layer are patterned, forming first openings in absorption layer. The first openings expose portions of the capping layer. Remaining portions of first photoresist layer are removed and a second photoresist layer is formed over portions of absorption layer. The second photoresist layer covers at least the first openings. Portions of the absorption layer and capping layer and plurality of multilayer of reflecting films not covered by the second photoresist layer are patterned, forming second openings. The second openings expose portions of protection layer and second photoresist layer is removed.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING CO LTDNO 8 LI-HSIN ROAD 6 SCIENCE-BASED INDUSTRIAL PARK HSIN-CHU 300-77

International Classification(s)

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  • 2019 Application Filing Year
  • H01L Class
  • 31892 Applications Filed
  • 24691 Patents Issued To-Date
  • 77.43 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances20192020202120222023202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hsu, Pei-Cheng Taipei, TW 111 530
Lee, Hsin-Chang Zhubei, TW 203 1090
Lien, Ta-Cheng Cyonglin Township, TW 104 198
Lin, Ping-Hsun New Taipei, TW 33 21
Wang, Shih-Che Hsinchu, TW 24 108

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges3335716251501 - 1011 - 20020004000600080001000012000140001600018000200002200024000260002800030000320003400036000

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