Protection layer on low thermal expansion material (LTEM) substrate of extreme ultraviolet (EUV) mask
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
-
Jun 4, 2024
Grant Date -
N/A
app pub date -
Aug 7, 2019
filing date -
Aug 7, 2019
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Fabricating a photomask includes forming a protection layer over a substrate. A plurality of multilayers of reflecting films are formed over the protection layer. A capping layer is formed over the plurality of multilayers. An absorption layer is formed over capping layer. A first photoresist layer is formed over portions of absorption layer. Portions of the first photoresist layer and absorption layer are patterned, forming first openings in absorption layer. The first openings expose portions of the capping layer. Remaining portions of first photoresist layer are removed and a second photoresist layer is formed over portions of absorption layer. The second photoresist layer covers at least the first openings. Portions of the absorption layer and capping layer and plurality of multilayer of reflecting films not covered by the second photoresist layer are patterned, forming second openings. The second openings expose portions of protection layer and second photoresist layer is removed.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD | NO 8 LI-HSIN ROAD 6 SCIENCE-BASED INDUSTRIAL PARK HSIN-CHU 300-77 |
International Classification(s)

- 2019 Application Filing Year
- H01L Class
- 31892 Applications Filed
- 24691 Patents Issued To-Date
- 77.43 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Hsu, Pei-Cheng | Taipei, TW | 111 | 530 |
# of filed Patents : 111 Total Citations : 530 | |||
Lee, Hsin-Chang | Zhubei, TW | 203 | 1090 |
# of filed Patents : 203 Total Citations : 1090 | |||
Lien, Ta-Cheng | Cyonglin Township, TW | 104 | 198 |
# of filed Patents : 104 Total Citations : 198 | |||
Lin, Ping-Hsun | New Taipei, TW | 33 | 21 |
# of filed Patents : 33 Total Citations : 21 | |||
Wang, Shih-Che | Hsinchu, TW | 24 | 108 |
# of filed Patents : 24 Total Citations : 108 |
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- 0 Citation Count
- H01L Class
- 0 % this patent is cited more than
- 1 Age
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