Piezoelectric based MEMS device with time sharing actuation and sensing circuitry

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 12001012
APP PUB NO 20220342205A1
SERIAL NO

17238596

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Disclosed herein is a microelectromechanical (MEMS) device, including a rotor and a first piezoelectric actuator mechanically coupled to the rotor. The first piezoelectric actuator is electrically coupled between a first signal node and a common voltage node. A second piezoelectric actuator is mechanically coupled to the rotor, and is electrically coupled between a second signal node and the common voltage node. Control circuitry includes a drive circuit configured to drive the first and second piezoelectric actuators, a sense circuit configured to process sense signals generated by the first and second pizeoelectric actuators, and a multiplexing circuit. The multiplexing circuit is configured to alternate between connecting the drive circuit to the first piezoelectric actuator while connecting the sense circuit to the second piezoelectric actuator, and connecting the drive circuit to the second piezoelectric actuator while connecting the sense circuit to the first piezoelectric actuator.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
STMICROELECTRONICS LTD7 GIBOREI ISRAEL STREET ADAR BUILDING NEW INDUSTRIAL ZONE NETANYA 4250407

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mendicino, Gianluca Legnano, IT 2 0
Sharon, Dadi Givat Ada, IT 4 4
Terzi, Davide Bergamo, IT 8 1

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Dec 4, 2027
7.5 Year Payment $3600.00 $1800.00 $900.00 Dec 4, 2031
11.5 Year Payment $7400.00 $3700.00 $1850.00 Dec 4, 2035
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00