Polycarbosilazane, and composition comprising the same, and method for producing silicon-containing film using the same

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United States of America Patent

PATENT NO 11999827
APP PUB NO 20230174724A1
SERIAL NO

17922800

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Abstract

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[Problem] To provide a polycarbosilazane making it possible to form a silicon-containing film which is bearable to acid etching, and a composition comprising the polycarbosilazane. [Means for Solution] The present invention provides a polycarbosilazane comprising a repeating unit of —[R1R2Si—(CH2)n]— and —(R3R4Si—NR5)—, wherein R1, R2, R3 and R4 are each independently a single bond, hydrogen or C1-4 alkyl; R5 is independently a single bond or hydrogen; and n is 1-2, and a composition comprising the polycarbosilazane. The present invention also provides a method for forming a silicon-containing film, comprising coating the composition above a substrate and heating.

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Patent Owner(s)

Patent OwnerAddress
MERCK KGAAFRANKFURTER STRASSE 250 DARMSTADT 64293

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Okamura, Toshiya Kakegawa, JP 9 9
Okayasu, Tetsuo Kakegawa, JP 12 41
Vom, Stein Thorsten Darmstadt, DE 7 6

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