Fifth-generation (5G)-focused piezoelectric resonators and filters

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United States of America Patent

PATENT NO 11996820
APP PUB NO 20210234528A1
SERIAL NO

17248402

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Abstract

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A piezoelectric thin film suspended above a carrier substrate is adapted to propagate an acoustic wave in a Lamb mode excited by a component of an electric field that is oriented in a longitudinal direction along a length of the piezoelectric thin film. A first signal electrode is located on the piezoelectric thin film and oriented in a transverse direction perpendicular to the longitudinal direction. A first ground electrode is located on the piezoelectric thin film and oriented in the transverse direction. The first ground electrode is separated from the first signal electrode by a gap in which the acoustic wave resonates. A first release window and a second release window are located at a first end and a second end of the piezoelectric thin film, respectively. Intermittent release windows are located beyond distal ends of the first signal electrode and the first ground electrode.

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Patent Owner(s)

Patent OwnerAddress
THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS506 SOUTH WRIGHT STREET 352 HENRY ADMINISTRATION BLDG URBANA IL 61801

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gao, Liuqing Champaign, US 4 8
Gong, Songbin Champaign, US 30 456
Lu, Ruochen Champaign, US 15 227
Yang, Yansong Urbana, US 12 13

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