Patterned x-ray emitting target

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United States of America Patent

PATENT NO 11996259
APP PUB NO 20220390395A1
SERIAL NO

17754998

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention is intended to provide improved patterned X-ray emitting targets as well as X-ray sources that include patterned X-ray emitting targets as well as X-ray reflectance scatterometry (XRS) systems and also including X-ray photoelectron spectroscopy (XPS) systems and X-ray fluorescence (XRF) systems which employ such X-ray emitting targets.

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Patent Owner(s)

Patent OwnerAddress
NOVA MEASURING INSTRUMENTS INC3090 OAKMEAD VILLAGE DRIVE SANTA CLARA CA 95051

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Newcome, Bruce H Sunnyvale, US 12 60
Reed, David A Belmont, US 53 655
Schueler, Bruno W San Jose, US 20 206

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