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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD	8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

International Classification(s)

• B81C:PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE M....
• B81B:MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-ME....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Chen, Yang-Che	Hsinchu, TW	39	114
Liang, Victor Chiang	Hsinchu, TW	108	292
Lin, Chen-Hua	Douliu, TW	54	292
Liu, Chwen-Ming	Hsinchu, TW	39	374
Teng, Yi-Chuan	Zhubei, TW	54	510
Tseng, Huang-Wen	Zhubei, TW	33	116

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
3.5 Year Payment	$1600.00	$800.00	$400.00	Nov 28, 2027
7.5 Year Payment	$3600.00	$1800.00	$900.00	Nov 28, 2031
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Nov 28, 2035

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 3.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 11993512

Dual micro-electro mechanical system and manufacturing method thereof

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