Dual-MEMS device with temperature correction of MEMS output based on relative MEMS operation
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United States of America
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May 21, 2024
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Mar 3, 2020
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Mar 3, 2020
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Abstract
In a high resolution temperature sensor, first and second MEMS resonators generate respective first and second clock signals and a locked-loop reference clock generator generates a reference clock signal having a frequency that is phase-locked to at least one of the first and second clock signals. A frequency-ratio engine within the MEMS temperature sensor oversamples at least one of the first and second clock signals with the reference clock signal to generate a ratio of the frequencies of the first and second clock signals.
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