Faraday rotators, optical isolators, driver laser arrangements and EUV radiation generation apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11988909
APP PUB NO 20200379281A1
SERIAL NO

16996238

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A Faraday rotator includes: a disk-shaped magneto-optical solid-state medium, a magnet generator configured to generate a magnetic field in the magneto-optical solid-state medium, a heat sink with a support surface for the magneto-optical solid-state medium, a reflector mounted between the heat sink and the magneto-optical solid-state medium and configured to reflect a laser beam entering the magneto-optical solid-state medium in a first impingement region on a first side of the magneto-optical solid-state medium facing away from the support surface, and a deflector configured to deflect the laser beam emerging from the magneto-optical solid-state medium back to a second impingement region at least partly overlapping with the first impingement region on the first side. An optical isolator can have at least one such Faraday rotator. A driver laser arrangement can have at least one such optical isolator. An EUV radiation generation apparatus can have such a driver laser arrangement.

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Patent Owner(s)

Patent OwnerAddress
TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING GMBHJOHANN-MAUS-STRASSE 2 DITZINGEN 71254

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Erhard, Steffen Korntal-Muenchingen, DE 5 75

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