Characterization of patterned structures using acoustic metrology

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United States of America Patent

PATENT NO 11988641
APP PUB NO 20210318270A1
SERIAL NO

17217527

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Abstract

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Systems and methods for inspecting or characterizing samples, such as by characterizing patterned features or structures of the sample. In an aspect, the technology relates to a method for characterizing a patterned structure of a sample. The method includes directing a pump beam to a first position on a surface of the sample to induce a surface acoustic wave in the sample and directing a probe beam to a second position on the sample, where the probe beam is affected by the surface acoustic wave when the probe beam reflects from the surface of the sample. The method also includes detecting the reflected probe beam, analyzing the detected reflected probe beam to identify a frequency mode in the reflected probe beam, and based on the identified frequency mode, determining at least one of a width or a pitch of a patterned feature in the sample.

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Patent Owner(s)

Patent OwnerAddress
ONTO INNOVATION INC16 JONSPIN ROAD WILMINGTON MA 01887

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kotelyanskii, Michael Chatham, US 8 46
Mair, Robin West Chicago, US 11 85
Mehendale, Manjusha Morristown, US 12 55
Mukundhan, Priya Lake Hopatcong, US 7 41

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